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碳化硅单晶抛光片规范
Specification for polished monocrystalline silicon carbide wafers
参考页数：17P.;A4
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碳化硅单晶晶型的测试方法
Test method for determining crystal type of monocrystalline silicon carbide
参考页数：9P.;A4
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碳化硅单晶电学性能的测试方法
Test method for measuring electrical properties of monocrystalline silicon carbide
参考页数：10P.;A4
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重掺硅衬底中氧浓度的二次离子质谱测量方法
Test method for measuring oxygen contamination in heavily doped silicon substrates by secondary ion mass spectrometry
参考页数：8P.;A4
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砷化镓晶片热稳定性的试验方法
Test method for thermal stability testing of gallium arsenide wafers
参考页数：6P.;A4
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红外吸收法测量砷化镓中硼含量
Determination of boron concentration in gallium arsenide by infrared absorption
参考页数：8P.;A4
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硅中间隙氧的转换因子指南
Guide to conversion factors for interstitial oxygen in silicon
参考页数：5P.;A4
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硅单晶中III-V族杂质的光致发光测试方法
Test methods for photoluminescence analysis of single crystal silicon for III-V impurities
参考页数：10P.;A4
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硅衬底中氮浓度的二次离子质谱测量方法
Test method for measuring nitrogen concentration in silicon substrates by secondary ion mass spectrometry
参考页数：8P.;A4
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光致发光法测定磷镓砷晶片的组分
Test methods for measurement of composition of gallium arsenide phosphide wafers by photoluminescence
参考页数：9P.;A4
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