| 内容提要（EN）： |
density; microelectronics; molybdenum disilicide; refractory silicides; sputtering; sputtering targets; tantalum disilicide; titanium disilicide; tungsten disilicide; Electrical conductors (semiconductors)--specifications; Electronic materials/applications--specifications; Metallic silicide; Molybdenum (electronic applications)--specifications; Polycaprolactone (PCL); Refractory silicide targets; Silicides; Tantalum (Ta)/tantalum alloys--specifications; Targets; Titanium silicide; Tungsten silicide (WSix) |
